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KLA-Tencor M-Gage 300 Spec

Manufacturer: KLA-Tencor
Model: MG 300
Serial Number: 1297-0809
Power Code: 115 VAC, 28VA max
Freq.: 50/60 Hz

Sub Systems:

  1. Digital Data Converter
  2. Printer
  3. Cable between DDC converter and printer

Spec:

  1. DDC = Model 20-03030
  2. Printer = Model 20-03050, s/n = 0986-785
  3. Main = Model MG-300, s/n = 1297-0809
  • Sheet resistance measurement tool
  • Accommodate up to 6” wafers
  • substrate thickness = 300mm – 650mm
  • Sheet resistance = 1-1999 square
  • Film Thickness = Minimum 100 A
  • Doping Type = P or N