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Nanometrics 215 Spec

Manufacturer: Nanometrics
Model: 010-0215
Serial Number: 0590-N1106-0071
Wafer Size: 4”
Equipment Description: Oxide Etcher
MFG yr: 1990
Freq: 50/60Hz

Sub Systems:

  1. Wafer Handler ; Model=7201-1491, s/n= 0590-N1106-0071
  2. AFT Head: Model=7007-0001, s/n= 062790-H6079
  3. Printer: Epson RX80, s/n=409279
  4. Computer / Monitor / Keyboard / Joystick

Spec:

  • Main
    • Nano Spec/AFT 215-S
    • Automatic Film Thickness Measurement & Mapping System
  • Thickness Range: 100 A to 50000 A
  • Multilense:
    • visible light = 10x object
    • 5x, 10x, 50x Multi lense option
    • UV Light
  • Wafer Transport: up to 6” (4”, 5”, 6”)
  • Wafer indexing: flat or notch
  • Stage Movement:
    • X:150mm
    • Y:150mm
    • Theta:360 degree
  • System Control: IBM PC/AT, 13” RGB Color Monitor
  • Computer Tower