Home > Used Equipment >

Rudolph EL III Spec

Manufacturer: Rudolph
Model: EL III (Ellipsometer)
Wafer Size: 200 mm
Serial Number: 7070
Wafer Size: up to 4”
Date Manufactured: 09/89

Sub Systems

  1. Small Spot Optics
  2. Other Optics ( A 7899 & A 7917 )

Thickness and refractive index measurements of double layer transparent films.

Operating Principles: Null Seeking
Operating Wavelength: 632.8nm

  • Resolution & Accuracy:
    • Polarizer or Analyzer _ 0.05¨¬
    • DELTA _ 0.1¨¬
    • PSI _ 0.05¨¬
  • Angle of Incidence:
    • Standard pin locations 70¨¬¡¾0.02¨¬ and 90¨¬¡¾0.02¨¬
    • Optional Pin Locations 60¨¬ and 80¨¬
  • Measuring Time: Typlical
    • Single Film: 15 seconds
    • Double Film: 20 seconds
  • Digital Output:
    • Serial ASCII,RS-232 / RUDOLPH
    • SEMI Communication Standards

Mounting Plane: 6¡± X 6¡± (15.2cm X 15.2cm) Horizontal with vacuum holddown.
Autocollimator / Microscope: Microscope magnification 9X. Field of view 15mm.
Thermal Printer: Built in. Dot-Matrix format. Alpha-numeric