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Tegal 956 Spec

Manufacturer: Tegal
Model: 956
Serial Number: 10637
Wafer Size: 6”
Date Manufactured: 1985
Application: Ashing
Equipment Description: Stripper

Operational Manuals, electronics Schematics included
Fully Refurbished

Sub Systems

  1. RF Generator (ACG 10)
  2. Pump (D30AC)
  3. Monitor / Keyboard (VT420)

Spec

  • Main system
  • RF Generator (ACG 10)
  • Monitor & Keyboard
  • Pump (D30AC)