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Tegal 903e Spec

Manufacture: Tegal
Model: 903e
Serial Number: 10648
Wafer Size: 6”
Application: Oxide
Equipment Description: Oxide Etcher

Operational Manuals, electronics Schematics & Spare Parts Drawing included
Fully Refurbished / As-Is

Sub Systems

  1. RF Generator (ACG 10)
  2. Pump (D30AC)
  3. Protable Programming Terminal
  4. Chart Recorder
  5. Temp. Contorller (2 ea)

Spec

  • Main system
    • 44”W x 42”D x 26”H
    • 500 lbs , 208 VAC, 30 Amp, 1 phase
  • RF Generator (CGA 10)
  • Chart Recorder
    • 9”w x 12”D x 5”H
    • 11 lbs, 115 VAC
  • Pump (D30AC)
  • Terminal / Keyboard