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Tegal 901e Spec

Manufacturer: Tegal
Model: 901e
Wafer Size: 6”
Application: Poly
Equipment Description: Nitride Etcher

Operational Manuals, electronics Schematics & Spare Parts Drawing included
Fully Refurbished

Sub Systems

  1. RF Generator (ACG 10)
  2. Pump (D30AC)
  3. Monitor / Keyboard (VT420)
  4. Temp. Controller (1 ea)
  5. Chart Recorder

Spec

  • Main system
    • 44”w x 42”D x 26”H
    • 500 lbs
    • 208 VAC, 30 AMmp, 1 phase
  • RF Generator
    • 20”w x 16”D x 10”H
    • 104 lbs
    • 208 VAC
  • CRT & Keyboard
  • Chart Recorder
    • 9”w x 12”D x 5”H
    • 11 lbs
    • 115 VAC
  • Temp. Controller
    • 24”W x 20”D x 30”H
    • 300 lbs
    • 208 VAC, 1 phase
  • Gas: Gas1,2,3,4 & Clean O2