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Tegal 803 Spec

Manufacturer: Tegal
Model: 803
Serial Number: 8030302
Wafer Size: 4”
Date Manufactured: 1985
Application: Poly Etch
Power Code: 208 VAC, 1 Phase, 40 Amp

Operational Manuals, electronics Schematics included
AS-IS Operational Part machine

Sub Systems:

  1. RF Generator (1 ea)
  2. Temperature controller (2 ea)

Spec :

  • Main system (45”w x 30”D x 24”H) * 208 VAC, 1 Phase, 40 Amp
  • RF Generator (RF-1, ENI) ; (17”w x 23”D x 27”H) * 208 VAC, 3 Phase
  • Temperature controller (2 ea) ; (17”w x 18”D x 29”H) * 115 VAC, 1 Phase, 15 Amp
  • Weight:
    • 341 lbs (Main)
    • 165 lbs (RF Generator)
    • 93 lbs (Temp. Controller)
  • Pump is not available
  • No Missing Part
  • Gas:
    • O2
    • CHF3
    • C2F6
    • He