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Eaton, NOVA-GSD 80 Spec
Manufacturer: Eaton NOVA-GSD 80
Model: NOVA-GSD 80
Machine type: High current
Power: 208V, 60Hz
Software version: Sun system 2.5.4B
End station: Same as GSD 200 series
Wafer handling: Same as GSD 200 series
Backup tool: 8mm tape drive
Programmable tilt angle: +/- 0~11 degree
Dose range: 1.0 e 11~16
Energy level: 0~80 KeV
Source type: ELS
Vaporizer: YES
Shower type: E-shower
Chiller: Neslab
V. Pumps: Dry pumps (edward/Ebara)
Turbo pump: Seiko seki H 2000C
Cryo pump: CTI
Cryo compressors: CTI 8300/8500
Disc cart: YES
This system is refurbished and upgraded by OEM in 2001.
After refurbishing, didn’t use not much (low mileage on the tool and great condition).
- Sun service monitor
- Class ULPA filtered work area, 20” color graphic light pen screen,
- Sun sparc5 workstation 480MB HD, SECS II interface, 18 wafer process disk