Spare Parts List
We offer spare parts for a variety of semiconductor manufacturing equipment. To check our item stock and a respresentative listing, click the appropriate category below.
To check availability, price, lead time or to place an order, please submit your request to sales@svtechind.com.
If you want something that's not listed, please fill out our request parts form.
Wafer Processing Equipment
Etch Part
- LAM — 20 items
- Tegal — 75 items
- Fusion — 39 items
- Gasonic — 13 items
- AMAT — 26 items
- Matrix — 2 items
Masking/Photolithography
- DNS — 361 items
- SVG — 302 items
- Nikon — 41 items
- UT Stepper — 38 items
- Filter — 34 items
- PR Pumps — 16 items
- Flow-meter — 9 items
- Regulator/Gauge — 12 items
Diffusion/Thin Film
- Furnace — 4 items
- WJ — 13 items
- Novellus — 30 items
- TOK/Semix — 0 items
- Laser Scriber — 15 items
Implant
- Eaton — 28 items
Other/Misc.
- Electronics — 44 items
- MFC — 16 items
- RF Generator — 7 items
- O-rings — 56 items
- TC — 5 items
Test & Assembly Equipment
Tester/Handler
Test & Measurement
- Microscope — 81 items
Lamps
- Ushio Lamps — 7 items
- Other Lamps — 10 items
Other/Misc.
- Lap Equipment — 6 items