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Masking/Photolithography

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DNS

part number description price in stock comment
AMD03-6-4-1D
Arm alignment Tool, 200mm
INA-13-746
ELEMENT T CLASS 0.4
DST-06M
2GK25K
2GK50K
2RK6GK-A2
3GN6K
DO688-122
DO982-122
J2214, Marsh Instrument, 1/4NPT
OGK7.5K
PH266-01
TS678N8E63
KDM30-PFF
MD-20RZ-1
MD-30RZ
4012429EC
FN30-Y15NTB
VACUUM SEAL, FAJ2-10-22-7
NVJ114-5G
NVZ110
NVZ110-5G-M5
NVZ1120
VJ3343Y
VO301
VPW2145
VX3134-X1
VZ110-5G-M5
VZ1120
VZ3120-5L-M5
VZ3220-5LZ-M5
VZ5140
030-4E1
110-4A2-F11
110-4E1
110-4E1-F11
200-4E1
F*W110-4E1-83
TRV-2-1/4-3
RTV-2-1/4-3
YDV-2-1/8-RC-1
4F111-06-FLS
EX110-SMB1
CLASS-100
ELD4V-OY
ELD4V-R3Y
EPDM-N
FPR-UDDF-71-6
SAV-3260-C23A
SV2100D-53T-FT-1/4T
SXC21CD-53T-FT -1/4T
AB31-01-1
EV2509-208
954-7700
8807
8805Z
6001ZZCNAV2S
6000Z
7000
6001DU
LINEAR GUIDE
LM132332
LM61219
68-018
SS6002Z
SC13UU
SUPER6
DS-L10H
EE-1001
EE-SPX
EE-SG3M
EE-SM3B
GL-514A
PRT501A
RS520L-D
502-G-200
5000mmH2O
3000mmH20
13.5" LONG PVC
7.5" LONG PVC
12.5" LONG STAINLESS
9.5" LONG STAINLESS
4.5" LONG STAINLESS
CS5B
D8-AL
F85-44629
F86-44371
0-0.4MPA
0-1Kgf/Cm2
0-50 mmH2O
1-10-1002 KPA
1-160 PSI
25-1201
6S09
7P06
8" EEW CONTROLER
8" EEW SET,
954-7700
A-Analog Brd, SEAD-0043, Spin Controller (O)
AB31-01-1
A-CPU Brd, SECU-004 Spin Controller (O)
A-I/O, SEIO-004, Spin Controller, (O)
B-Analog Brd, SEAD-104 Oven Controller (O)
B-Analog Brd, SEAD-204 Oven Controller (S)
B-CPU Brd, SECU-104, Unit Controller 105 (S)
B-CPU Brd, SECU-104A1 Master Controller 106 (O)
B-I/O Brd, SEIO-104A, Master Controller (O)
B-I/O, SEIO-104B, Spin Controller (S)
BLU1 Amp Brd
Bottom Cup Assy
Capacitor, SH Cap M
CDA50X10-R
CDQ1B32-01-36204
CDQ2B20-30DC
CDRA1BW30-90
Chuck, Spin SSC-005
CM44849
Conduit Assy, M-150, 6 inch
CQ2B32-10DC
CQ2B32-30DC
CQ2WB32-20
Cup Assy. (3 pcs) 2 sets 5 inch
DA25X90-W
E52-CA15A649
ELEMENT K CLASS 0.4
EV2509-208
F87-40354
F95-45071
F96-43378
G3C-202-P1
Grease, NSK LG2
IF UNIT FOR ASML, 6"
IF UNIT FOR CANNON, 6"
IF UNIT FOR CANNON, 8"
INA-13-757
INA-13-796
INA-13-810
INA-13-815
JDAS20X40-B-699W
Loose parts: two 8->6 reduct fitt, nuts, ferrules
Millipack 200 Stacked Disc Filter 0.22um Pore Size
Motor, 2GK25K
Motor, 2GK30KA
Nozzle, 3&4 MM
PBDAS16/190-A
PDAS10X15
Remote Control Panel (80B)
Round pcs (2) ~7 inch in diameter
S-1201
SR-4000
SV2100D-53T-FT-1/4T
SXC21CD-53T-FT-1/4T
Top Cup Assy
0-07-A5017-3 Capillary Nozzle, 6/4 FEP
0-07-A54578 sector
0-17-A4567-4 SPIN CHUCK
0-17-A5466-8 pulley
0-17A-55860 pin
0-39-01056 KDM10-PF
0-39-03220 050-4E1-01
0-39-03247 051-E1
0-39-07607 FUBV-115D
2-39-00001 VACUUM SEAL, AF8-22-8
2-39-00001 Vacuum Seal
2-39-00604 2CSM-101
2-39-03480 DAN20X10
2-39-04521
2-39-05544 AC SERVO MOTOR (636)
2-39-05845 VPW2135SN
2-39-07828 LM101929
2-39-11798 FTV-2-1/2-8SCB
2-39-12432
2-39-12493 AC SERVO MOTOR (636)
2-39-12509 0-0.2MPA
2-39-12510 OD/F-18mm, H-5mm
2-39-12525 OD/F-15mm, H-5mm
2-39-20002 YDV-3-1/8-RC-1
2-39-20009 Nozzle, HYYP-N2
2-39-20928 AWR-1504GLW
2-39-22591
2-39-22607 VZA2220-M5-X2
2-39-22646 Temperature controller, 636
2-39-22655 CERAMIC BALL, 3/32
2-39-22657 O-ring G75EP BAND/CLP
2-39-30047 Gear Head 3GK15K
2-39-30128 DSR-3151
2-39-3112 EPDM-10Kgf/cm2, 50-500 cc
2-39-31383 F93-44570
2-39-31487 A040-4E2-34W
2-39-31488 EE-SX673
2-39-31529 A040-E1
2-39-31609 EE-SX670
2-39-31726 Flow meter, F96-44038, 5-50
2-39-32100 DAN20X40-CS4MA2
2-39-32546 TS3413N1E4
2-39-32712 Molibdenum Grease
2-39-32984 FSU-210-R5
2-39-33218 EE-SX671
2-39-33219 EE-SX672
2-39-33780 AC SERVO MOTOR(629)
2-39-34612 Coil Spring, 6674
2-39-34613 Coil Spring
2-39-34614 Coil Spring, 2171
2-39-35666 Pneumatic Cylinder
2-39-36650 FSU-211-R5
2-39-36650 Sensor, Capacity
2-39-38907 OGK25K
2-39-38917 IND CASSETTE DETECT SWITCH
2-39-38933 EBR, Tip 0.3 MM, SN23G
2-39-39200 A040-4E1-34W
2-39-39335 AC SERVO MOTOR (60A)
2-39-44654 S-U_8B
2-39-44723 B03E8 Plugs
2-39-44724 B03D5 Plugs
2-39-44784 Fittings
2-39-44785 Fittings
2-39-45543 AC SERVO MOTOR (80B)
2-39-45641 LINEAR GUIDE
2-39-46490 UPH596-B
2-39-47761 Suck Back unit
2-39-48308 A4921-9215KE
2-39-51854 Pressure Switch (80B-LPH) 720 Torr
2-39-52118 F10T1G-PL-FZ-CP3
2-39-53647 SI Nozzle
2-39-53771 F96-42869
2-39-54074 LG2 Grease
2-AB-04833 Nozzel, EBR Assy.
2-AC-00387-1 Nylon Brush, JSB-4-261
2-AC-00388-1 Nylon Brush, JSB-4-361
2-AC-00391-1 Nylon Brush, JSB-4-371
2-AC-00958 SPIN CHUCK
2-AC-00958 Chuck, 6 inch Spin SSC4006
2-AC-00959 Chuck, 6 inch Spin SSC4007
2-AC-00980 Guide Ring SNG4040N2
2-AJ-60409 3", 76.2mm dia. Wafer
2-AJ-60410 4", 100mm dia. Wafer
2-AJ-60411 5", 125mm dia. Wafer
2-AJ-60412 6", 150mm dia. Wafer
2-AJ-60493 6", SSWR 150mm dia. Wafer
2-AJ-60494 5", SSWR 125mm dia. Wafer
2-AJ-60495 4", SSWR 100mm dia. Wafer
2-AJ-60938 VACUUMLESS ARM
2-AJ-80703 VACUUMLESS ARM
2-AJ-90216 VACUUMLESS ARM (80B)
2-AR-92090 VACUUMLESS ARM (80B)
2-F2-33100 4", UPPER ARM, 100 mm
2-F2-33101 4", LOWER ARM, 100 mm
2-F2-33104 5", UPPER ARM, 125 mm
2-F2-33105 5", LOWER ARM, 125 mm
2-F2-33110 6", UPPER ARM, 150 mm
2-F2-33111 6", LOWER ARM, 150 mm
2-F2-33150 3", UPPER ARM, 76.2 mm
2-F2-33151 3", LOWER ARM, 76.2 mm
2-F2-33191 SSW/SCW 8" (OD 80MM)
2-F2-33332 SDWP 5" - 6"(OD 54MM)
2-F2-81975 SDWP 5" - 6" (OD 54MM)
2-F2-81976 SPIN CHUCK (OD 70MM)
2-F2-81977 SSW/SCW 8" (OD 80MM)
2-F2-D0400 Spin Chuck, PEEK
2-F3-31387 Nozzle Pot, Lower
2-F3-31399 IH ARM (90)
2-F3-32084 SPIN CHUCK (OD 70MM)
2-F3-32084 Coater Spin Chuck
2-F3-32678 SPIN CHUCK (OD 60MM)
2-F3-33159 SPIN CHUCK (OD 70MM)
2-F3-33569 IH ARM (100)
2-F3-37635 52-010
2-F3-37640 IF-A WAFER CENTERING ARM
2-F3-38335 IH ARM (L=135)
2-F3-38335A IH ARM (L=135)
2-F3-38538 IH ARM (L=160), Ceramic
2-F3-38538A IH ARM (L=160), TFE Coated
2-F3-38768 IH ARM (115)
2-F3-39031 SPIN CHUCK (OD 54MM)
2-F3-39031 Developer Spin Chuck
2-F3-80386 IF-B SLIDER, CERAMIC
2-F3-80766 IF-B SLIDER, CERAMIC
2-F3-81569 8", UPPER ARM, 200 mm
2-F3-81570 8", LOWER ARM, 200 mm
2-F3-81571 6", UPPER ARM, 150 mm
2-F3-81572 6", LOWER ARM, 150 mm
2-F3-81573 5", UPPER ARM, 125 mm
2-F3-81574 5", LOWER ARM, 125 mm
2-F3-82177 6", SSWR 150mm dia. Wafer (60A)
2-F3-83170 5", SSWR 125mm dia. Wafer (60A)
2-F3-83172 4", SSWR 100mm dia. Wafer (60A)
2-F3-87998 SPIN CHUCK (OD 45MM)
2-F3-87999 SPIN CHUCK (OD 60MM)
2-F3-88000 SPIN CHUCK (OD 70MM)
2-F3-88167 SPIN CHUCK (OD 30MM)
2-F3-88168 SPIN CHUCK (OD 54MM)
2-F3-90875 Lifter Pin with bellows
2-F3-91704 Arm
2-F3-D0311 TR1 8 inch Arm (H/W fingers:5)
2-F3-D0312 TR1 8 inch Arm
2-F3-D0659 TR2 8 inch Arm (H/W fingers:6, tabs:6)
2-F4-39704 Spacers
2-F4-80268 EBR Nozzle
2-F4-81638 arm, 76.2 - 100mm dia.(3 - 5") Wafer (60A)
2-F4-81639 arm, 125 - 200mm dia.(5 - 8") Wafer
2-F4-85088 WAFER GUIDE
2-F4-88194 WAFER SUPPORT
2-F4-88194 Tabs
2-F4-92876 CASSETTE BASE
2-F4-92877 CASSETTE BASE
2-J3-30480 SPIN CHUCK (OD 45MM)
2-J3-31887
2-J4-30956 Wire rope, TR unit L=472
2-J4-33396 SPIN CHUCK (OD 30MM)
2-J4-34442 Nozzle Pot, Upper
2-J4-36047 arm, 76.2mm dia.(3") Wafer (60A)
2-J4-36048 arm, 76.2mm dia.(3") Wafer (60A)
2-J4-36049 arm, 76.2mm dia.(3") Wafer (60A)
2-J4-36050 arm, 100mm dia.(4") Wafer (60A)
2-J4-36051 arm, 125mm dia.(5") Wafer (60A)
2-J4-36052 arm, 150mm dia.(6") Wafer (60A)
2-J4-86830 Spacer for spin chuck
2-J4-86830-C Spacer for spin chuck
2-VC-00233 B-I/O Brd, SEIO-104B IFC/ECE Controller (S)
2-VC-00234 Sensor AMP SEAP-005
2-VC-00260 B-I/O Brd, SEIO-104, Oven Controller (O)
2-VC-00261 B-Memory Brd, SEMR-104A1, Master Controller (S)
2-VC-00262 B-Serial Brd, SESI-104A, Master Controller (S)
2-VC-04419 B-CPU Brd, SECU-106AA
2-VC-16233-1 CHEMICAL CONTROLLER
5-39-01751 SSU-12
5-39-03299 QEV-8V-5D
5-39-63595 FPR-91-12-7
5-F4-74990 bolt
7-39-01428 Coil Spring
7-39-03318 AC SERVO MOTOR (612)
7-39-03664 Regulator, R-300-03-BW,0-6 Kgf/Cm2
7-39-05037 EX110-SMB2, manifold w/SI unit
7-39-05040 HT-DS4452-PT3/8
7-39-06278 VJ3133Y
7-39-13137 Fuse Link
7-39-22227 1/4-600WOG
7-39-22925 6010-H-ZZ-PS2S
7-39-24646 1/2-600WOG
7-39-26355 FPM-M
7-39-27362 9UH-13PB
7-39-27616 0-160 PSI
7-39-27825 3RK15RGN-A
7-39-28707 7-39-28707
7-39-28776 7-39-28776
7-F4-24847 Coil Spring, S304-PWB
CHUZOSOP1 Filter, 0.05 um
CWFG00403 Filter, 0.2 um
CWUZOSOS3 Filter, 0.05 um
JSB-4-162 Nylon Brush, JSB-4-162
JSB-4-171 Nylon Brush, JSB-4-171
JSB-4-172 Nylon Brush, JSB-4-173
K-4415A THERMO FUSE
NP7-12 Yuasa, rechargeable battery, 12V,7ah
PWB-820212-1 ISO IN pcb
PWB-820213-0 ISO OUT pcb
PWB-820221-1 CPU-2
PWB-820222-2 analog I/F pcb
PWB-820223-0 console I/F pcb

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SVG

part number description price in stock comment
1/8" Nozzle
Blast boil heater
Cable Pulley
Catch cup
Catch cup insert
CONXALL
Flow Sensor
M-70-5-S-AX-AIO, flow switch
Over Temp Sensor
Parker Valve, SV-1-1134-2
Splash guard
SVG Pump rebuilt kt.
TANSISTOR MJ11033
Timing Belt
00059 ENCODER DISK
01-03245 Linear Bearing
01-05545-01 wafer sensor block, right
01-05545-02 wafer sensor block, left
03-80312-01 RerC Key pad
030-00272 Az Baffle Cap Assy.
06720-01 Bearig seal, spacer
06721-01 spindle shaft for developer
06721-02 spindle shaft for coater
06722-02 SPINDLE TUBE
06734-08 SPINDLE CHUCK
07-03038 Bowl Seal
1-140-043 FG Cam Unit Input Vavle Assy
100-001 Optical Sensor OPB8138
100-002 INTERRUPTIVE,OPTICAL SENSOR 814
100-032 Sensor, cap. Wafer
102-0020 LED, green
102-0023 LED, red
103-110011 TRANSISTOR PNP DARLINGTON
103-2955 TRANSISTOR PNP 75W 60V
103-3715 TRANSISTOR 2N3715 NPN 150W 80V
103-4401 TRANSISTOR NPN 350W 40V
103-4403 TRANSISTOR 2N4403 PNP 350W 40V
103-5884 Transistor 2N5884
103-6051 transistor 2N6051
103-6388 Transistor
103-6403 TRANSISTOR NPN DARLINGTON
107-018 Relay
109-001 Cassette Sensor Switch
109-003 Pressure to electrical switch
109-014 vacuum switch
109-028 Key Lock Switch
109-056 Switch, Momentary
109-093 Switch temp
109-102 Switch, liquid
109-115 Switch, subminiature
109-144 Switch, subminiature
109-154 Switch, temp.
109-171 Switch Flow SPST, 5 GPM
11-00046 Hollow Screw
11-01091 Filter Bowl Modification
110-005 Lamp
110-013 Lamp
111-052 Circuit Breaker
111-061 Circuit Breaker, AA1-B0-24-615-1B1-C
111-084 Fuse, 0.5 A
112-001 Motor, conveyer 24 Vdc 5.9:1
112-005 High Speed Motor
112-007 Motor Brush for high Speed
112-010 GEAR MOTOR DC24V 65.5:1 RATIO
112-010 GEAR MOTOR,6V DC 5.9:1
112-011 GEAR MOTOR,12V DC 19.7:1
112-012 GEAR MOTOR,15V DC 5.9:1
112-036 STEPPER MOTOR,LINZAR ACTUR
112-038 MOTOR OF GEAR,24VDC,10:1 RATIO
112-040 GEAR MOTOR 30V DC 38.3:1
112-041 STEPPER MONTOR
112-066 GM9432E953, 24VDC, 65.5:1
112-067 High Speed Spindle motor
112-071 Motor
112-077 GEARMOTOR DC 24 V, 65.5:1
112-106 GM9413E435, 24VDC, 65.5:1, ATS
114-001 VALVE 3 WAY 24VDC FOR AIR
114-002 Valve Solenoid, 4 way 24V
114-007 VALVE SOLENOID 2 WAY 100 PSI, 24VDC 6W
114-012 2 way solenoid valve
114-020 Solenoid Valve, 24 Vdc, M31E1
114-023 Solenoid Valve, 24 Vdc
114-024 Solenoid Valve,
114-025 Valve
114-038 Valve Solenoid
116-012 Connector
121-026 BATTERY 2.4 VOLTS
121-100 TC,BarcoPac M133-20012-0-0-19
121-106 HOT PLATE TEMPERATURE CONTROL
1430-00180 Timing Belt
14508-02 Tub-pivot dispense
15994-01 CENTERING TAB SUPPORT ARM,LEFT
15994-02 CENTERING TAB SUPPORT ARM,RIGHT
16188-01 pin wafer chill
16195-01 COUPLING
16215-01 Forearm 4.75", ATS Arm
16290-01 Forearm 3", ATS Arm
16388-01 3 plat form
16418-01A
16689-01 Forearm 6.12", ATS Arm
17-16938-01 Flow conrtrol sensor, Kit
17-530-02 Nozzle, Coat
17276-01 EBR- locking nut
18413-01 Coat, Spindle
18810-03 Panel Overlay, coater/oven, SVG8826PC/8836HPO
18810-14 Panel Overlay, coater/oven, SVG8826SMC/8836
18810-7 Prime/oven, pad cover
18870-10 Dad, developer oven
19108-01 SPINDLE CHUCK
19959-01 cover Top Hi. Accell
201-001 Bearing 1/8x5/16, SST
201-005 Bearing
201-006 Ball bushing 3/8x5/8
201-007 Ball bushing seal
201-013 Clutch
201-014 Clutch Housing
201-015 Spindle Seal
201-017 Ball bearing, 1/4x8/5
201-027 Bearing
201-063 Bearing
201-079 Vacuum Seal
201-085 Linear BRG seal
201-144 Bearing, coater
2012 Clippard Valve, 3 way
202-023 O-ring
202-098 O-ring
202-099 O-ring
202-158 Timing belt, moving arm
202-186 O-ring, Viton
202-187 O-ring, Viton
202-198 O-ring for pump
202-201 Timing belt
202-211 Timing belt
202-228 O-ring
202-247 O-ring
202-252 Timing belt, 4.75"
202-254 Timing belt, moving arm
202-256 Timing belt, 3"
202-260 O-ring, VPOLID-2-373
202-262 Pulley Timing belt
202-278 belt
202-279 Timing belt, 6.12"
202-283 Teflon, O-ring
202-303 O-ring, Seal
202-311 O-ring
202-315 Timing Belt
202-372 timing Belt
202-418 Belt, Timing
203-001 Air Cylinder Carriage
203-005 3 Way Cylinder
203-011 Cylinder, 3/4" DI, 1" stroke
203-062 CYLINDER
203-065 Air cylinder 3/4"boreX1" strokeX2"L
203-066 HMDS LID AIR CYLINDER
203-074 CYLINDER
205-003 Spring washer
205-004 Retaining Ring
205-062 Ring
205-095 Ring Retainer
205-173 Washer
205-190 Ring
205-581 Gasket
205-999-041 Upgrade Kit
205-999-047 Tube Insert 1/4" SWG
206-032 Fi-Hing
206-176 miniature fitting Assy
206-198 Ferrels, coater
206-247 Ferrels, coater
206-527 Quick Connector
206-621 coupling
206-699 fitting
206-701 fitting
206-702 coupling body
206-850 COUPLING
206-996 fitting
206-999-0011 fitting, 4 way
206-999-0013 Quick Disconnect
206-999-0047 Tubing insert 1/4 SWG
207-004 & -005 GASKET
207-014 GASKET NY
209-020 gauge
209-034 Flow meter, 5-50G
210-020 Gasket, Liq
210-035 packing gland
210-036 packing gland
210-046 fitting
211-019 Spring
211-027 Seal metal "E" type
211-036 spring
211-061 Spring external
211-065 Spring external
212-003 tubing,3/32, blue
212-012 Tubing
212-028 Tubing
212-068 tubing, exhaust for HPO, per foot
212-148 tubing, 1/4" clear
213-005 valve diaphragm
213-020 valve
213-021 Pneumatic Valve
213-051 VALVE SOLENOID 24VDC 10W
213-063 Air Operates Valve
213-138 fitting
213-139 Teflon valve, PV-1-2334, Parker
215-013 Shaft Coupling
215-021 Torque Coupling
215-156 coupling
216-039 clamp
216-041 clamp hose
216-072 clamp
216-081 hose clamp
217-012 Filter Bowl Modification
217-067 Filter, Hepa
217-089 SVG Filter, Millipore
220-002 Timing belt, pulley, motorside
220-033 Timing belt w/ stepper motor
220-038 Timing belt, pulley, adjustable
222-005 Catch Cup Rinse Cable
2N3751 audio power amp NTE130
41870-01 fitting
43202-01 Splash guard
43202-02 Splash guard
46321-01 Part of upgraded kit
530-0722 Connector Male
530-1506 Union straight 1/4T x 1/4T
530-7134
530-7414
70774 #1
70774 #2
70774 #3
70774 #4 EPROM (C2D)
70774 #5
70892-40 RecC EPROM
80103D2-30
80157E PCB ATS Transport Arm
80171A Extender Board
80198 Photo Resis Bath, PCB
80198 Photo Resis Bath, PCB
8832 GO-MD /8836, coater
90-AIO-008 spindle tube rebuild kit
90105 G P-unit
905-000122 Nylon #10 Gasket
98-00771 Spindle Tube Assy.
98-04726 Dispense Assy.
99-00269-01 skinner valve
99-00269-05 Valve
99-00802 Air cylinder Harness
99-03234 Indexer Harness
99-04089 THERMOCOUPLE ASSEMBLY
99-06025-03 INTERRUPTIVE SENSOR ASSY
99-06025-04 INTERRUPTIVE SENSOR ASSY
99-06603-01 8620/26 Spindle tube Assy.
99-06603-02 SPINDLE TUBE ASSY.8632 CTD
99-06614-04 86 new indexer Assy
99-06721-01 spindle shaft for coater
99-06721-02 Spindle Shaft got developer
99-116098-02 Step motor Hi
99-14416-01 Clutch comp assy.
99-14430-01 moving dispense motor assy.
99-16070-10 Indexer
99-16310-01 INDEX SENSOR PCB
99-16310-03T Harness, 8800, indexer
99-16359-02
99-16372-01 cable
99-16587-01 ASSY STEPPER MOTOR
99-18427 cable
99-19469-01 CTD TEMP.CONTROLLER 115V/60Hz
99-19766-02 Flow Sensor
99-19960-01 SMC Hi-performance Spindle Tube Assy.
99-37934-01 Centering Arc Base Assy
99-37965-01 Paddle Assy, 6" wafer
99-38846-01 predyne solenoid valve
99-5000-01 PCB SINGLE SENSOR
99-5001-01 PCB DULE SENSOR
99-5003-01 PCB VACUUM SENSOR
99-80000-01 BOARD PC SINGLE SENSOR
99-80000-02 ENCODER SENSOR
99-80001-01 BOARD,PC,DOUBLE SENSOR
99-80001-02 INTERRUPTIVE SENSOR/DUAL SPEED
99-80068 SPEED CONTROL BOARD
99-80073 DISPLAY BOARD ASSY
99-80074 Key board pcb
99-80082 pcb-power supply
99-80084 Extender Board
99-801030B1-26 BOARD ASSY CPU FOR DEVELOPER
99-80122-500 TRACK INTERFACE PCB, 81
99-80122B1-01 TRACK INTERFACE PCB
99-80157-01 ARM PCB
99-80158-01 ASSY PCB SINGLE SENSOR
99-80309-01 PCB power supply
99-A10-900 AIO TRACK INTERFACE BOARD
A122-0045-00 ASME RE Valve for Dep. Canistor
A20-844 Flow Switch HMOS
AIO-0088 Liquid sensor, 6916-200, Madson
AIO-0786 SPINDLE CNTROLLER
KAS-70-1-6 CAPACITIVE SENSOR
NPD-200-1 Caps
P/N = 42295 LS-3 Polysalfone
SBV134 Furon, Teflon Suckback Valve
SS-QC4-0-400KR Quick connect
SV-1-1334-2 Teflon Solenoid valve, parker
W1176-311 K12L Sswitch pressure 5PSI
ZSEA-T1-25 SMC Pressure Switch

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Nikon

part number description price in stock comment
WAFER HOLDER 6 INCH (NEW)
12031-IC R-STAGE SRV
12034-2B MOTOR DRV
12038-4 STGXY
12071-1 THETA-Z CONTROL
12072-1 ANALOG IF
13036-2 R,ALIGN
13037-3A LASER BRD
14036-2 PEM PSD
14036-2A PEM PSD
14036-2A PEM PSD
14036-3 PEM PSD
14036-IC PEM PSD
14105 W.A.ANLG-2A
15021-1A BLIND STPR 1
15030
23046-2 BUS RECEIVER
23048-3 PEM I/O
23049-2D SR CNTRL
23050-1D EXP. CNTRL
23065-B JOYSTIK IF
23070
23074-2 FDC-85B
23081-2
23082-1
23083-1
23116-1 WDC85A
23129 BUS INTERFACE
23130 LSA INTERFACE
24068-1B FP CONTROL
24083A BUS DRIVER
25010-2 RAM64K
26002-6 CPM-85IA
26002-6 CPM 85IA
26028-1A (NK851) IC-RSA v 1.2
27096 DISPLAY X-Y
27124-1 FRZ BRD
30059-1A (206EA65)
30061B ERR LMP
30149-1
NP23131 COUNTER I/F

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UT Stepper

part number description price in stock comment
Absolute position Plate, 1000
Blind Step Test Reticle
UTS 102H 1.0-1.2
HP 10746-60001
230-6112M, 20Vdc, motor
Reticle Strike Plate
Reticle Strike Finger
Focus Reference, model 250
Rapidsyn Shutter Assy
C956-04 Hamamatsu
current limiter
Theta Stage Assy.
01-05-00186 chuck 4", 1000
01-05-00187 chuck 5", 1000
01-05-00189 chuck 6", 1000
0503-203800 Stage motor amplifier, 140
0503-242900 Fast Pulse converter
0503-319200 Focus Panel I/O, 191-2
0503-326600 Auto Photo Baord, 170
0505-391000 Rev.E
0506-241300 assy, wafer align sw
0506-257200 Diaphragm
0509-276200 PMT alignment Scope
0513-419700 Stage Servo
0535-577200 Air Bearing, short
0535-577300 Air Bearing, medium
0535-577400 Air Bearing, long
0553-678400 lower flat assy 4-6 "
0606-446200 200u, cross mask
07-08-00881 wafer, Mega Frost, 5" flat
1005-233101 Y- drive rod
1005-233202 X- drive rod
1009-396400A PMT scope
1054-603500 Ellisoidal Mirror
11-01-00045 mod. Xmask, 90u
2108-000302 output sensor
3806-000003 HP 10780C Receiver
3903-000001 PMT Tube

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Filter

part number description price in stock comment
Duallex, 0.2 um filter
202-AP
AF400-04 Air filter
AP2502200 liquid filter
CHUV8S0P1 0.1u
CWFA00403 1u, developer
CWFG00403 0.2 developer
CWFG0M1S3 0.2u,
CWFG0S1S3 0.2u
CWUV01P01
DFA1FDESNP84M 0.05u
DFA1V001EYNP64M 0.1u
DFA4201NIEY 0.1u, DI
DFA6402V001EY 0.1u
DFR4001AX 0.45u
GLFDF3000VMM4
GVWP04700 0.22u, DI
MCD9140UFREJ 0.2u, 40 stack
MPFL10CB3 0.22u, N2
MPGL10CB3 0.22um, N2
N-30 NASclean, Metal Gas Filter
SLFG025XS 0.2u dualex, N2
UMF0627
WCFG40HP1
WGFA16D21 0.2u, developer
WGFA16HP2 1u, phot resist
WGFG01DS0 N2
WGFG01HC1 1/4" VCO
WGFG16001 0.2u
WGFG16021 0.2u
WGFG16D01 0.2u
WGFG40S01
WGGB06S02 0.05u
WGGBOIKSO Air filter

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PR Pumps

part number description price in stock comment
Tritech Industries
Milipore, pumpair controller cable
1-105-067 Elbow Input Fitting
1-110-040 FG IDI, solenoid valve Y, HP
1-110-041 FG IDI, solenoid valve 12V
1-139-020 FG/-13 IDI, pcb, M300 mother board
1-139-022 FG IDI, pcb, control assy.
1-139-030 FG IDI, pcb, M310 control-F.
1-139-031 FD IDI, M310 chemical interface pcb
1-140-159 FG IDI, suckback combo Valve
219-147 Milipore, WCDS Interface Box
P22124 Milipore, pump rebuilt kit
PDA-10H Iwaki Auto Damper
SF-131LS Nitto Denko, pump
WCDS000F2 Milipore, WCDS controller
WCDS000F2 Milipore, WCDS controller

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Flow-meter

part number description price in stock comment
0 -65
F-96-42869 0.1 - 1 with flow sensor
F-96-43378 3-15
F85-44629 1/4BQ, 0.96-1.05, 0.3 - 3
F86-44518 3 - 30, SP, GR 0.75-0.85
F87-40354 50 - 500, 0.96-1.05
F93-44570 50 -500 cc
F95-45071 0.3 - 3
F96-44308 5 - 50

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Regulator/Gauge

part number description price in stock comment
-100 ~ 100 Kpa backside mounting
0 ~ 0.4 Mpa
0 ~ 0.2 Mpa
0 ~ 1 Mpa
-30 ~ 100 Kpa backside mounting
0 -100
-30 - 100
76 - 0 cmHg
18-013-212 0 ~ 160 Psi
INA-13-810-02 SMC
K-12 0 ~ 160 Psi
R-300-03-13W

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