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Diffusion/Thin Film
You can browse through our list of Diffusion/Thin Film spare parts below or jump to a category:
Furnace
| part number |
description |
price |
in stock |
comment |
| 040-928178 |
Heating Element |
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| 044-92468 |
Heating Element |
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| 044-928290 |
Heating Element |
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| 044-928404 |
Heating Element |
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WJ
| part number |
description |
price |
in stock |
comment |
| 911429-001 |
shield, 1000 |
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| 911429-001S |
shield, 1000 |
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| 911430-001 |
shield, 1000 |
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| 911430-001S |
shield, 1000 |
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| 911626-001 |
shield, 999 |
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| 911626-001S |
shield, 999 |
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| 911627-001 |
shield, 999 |
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| 911627-001S |
shield, 999 |
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| 914252-004 |
conveyer belt, flat-wire type |
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| 914252-006 |
conveyer belt, 1000/1500 |
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| 918045-001 |
sheild, 999, ver 3.1-3.5 |
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| 929342-001 |
shield, 1000, ver 3.0 |
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| 929345-001 |
sheild, 999, ver 3.1-3.5 |
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Novellus
| part number |
description |
price |
in stock |
comment |
|
SiH4, 350 SCCM,MFC |
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cable |
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cable |
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cable |
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HTR 4.0 T-VLV.NOV.1APO |
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| 05-0124R-053 |
in line gas filter, 1/4"VCR |
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| 06-0434R-804 |
valve |
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| 07-0434R-121 |
shut-off valve |
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| 15-00341-00 |
screw, 1/4-20x.42 hex |
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| 15-00371-00 |
nut, heater strap 1/4-20 |
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| 15-00372-00 |
washer, heater strap |
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| 15-00386-00 |
washer, nickel, #10 |
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| 15-00399-03 |
screw, 8-32x.55 hex hd |
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| 15-00399-04 |
screw, nickel, 8-32x1.02 hex |
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| 15-00399-05 |
screw, nickel, 8-32x1.12 hex |
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| 15-00457-00 |
screw, 10-32 hex hd |
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| 15-00654-00 |
clamp, flange |
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| 15-00698-00 |
screw, nickel, 10-32x.72 hex |
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| 15-00699-02 |
FINGER CERAMIC 200mm |
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| 15-00729-00 |
flange |
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| 15-00866-00 |
SPRING CERAMIC PAD |
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| 15-00951-00 |
cup screw cover |
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| 15-032631 |
spindle, flange |
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| 20-00155-00 |
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| 22-136143-00 |
N2, 50 SLM MFC |
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| 27-126062-00 |
MKS |
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| 27-126669-00 |
MKS |
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| 27-12667-00 |
MKS |
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| 60-126668-00 |
MKS |
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| 9540-0155 |
Vacuum Piping Heater |
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Laser Scriber
| part number |
description |
price |
in stock |
comment |
|
Barb Fitting |
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O-ring for pump |
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Tool |
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| 0020-06834 |
ASL, pin, Geneva wheel locking |
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| 0201-00378 |
114/116 Lamp jacket |
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| 0201-00548 |
Cathod connector |
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| 11051 |
Lamp End Plate |
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| 11052 |
Lamp plate |
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| 1404-01022 |
Lamp pressure |
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| 2251004 |
Lamp End Plate |
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| 2301004 |
Switch |
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| 2301005 |
Switch |
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| 3011244 |
Reflector Assy |
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| DLT 10123 |
Filter |
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| O5-LHR-123 |
Laser light |
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